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The science and engineering of microelectronic fabrication Stephen A. Campbell
Material type:
TextLanguage: English Series: The Oxford series in electrical and computer engineeringPublication details: New York Oxford University Press 2001Edition: 2nd edDescription: xiv, 603p. 23 cmISBN: - 0-19-513605-5
- 621.38152 CAM/S ed.2
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IST Reference | Reference | 621.38152 CAM/S (Browse shelf(Opens below)) | Not For Loan | 4408 | ||
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IST General Stacks | 621.38152 CAM/S (Browse shelf(Opens below)) | Available | 4407 | |||
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IST | 621.38152 CAM/S (Browse shelf(Opens below)) | Available | 4410 | |||
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IST | 621.38152 CAM/S (Browse shelf(Opens below)) | Available | 4409 |
includes bibliographical references & index
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