The science and engineering of microelectronic fabrication (Record no. 815)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00773nam a22002417a 4500 |
| 005 - DATE & TIME | |
| control field | 20211112163718.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 170712b xxu||||| |||| 00| 0 eng d |
| 020 ## - ISBN | |
| International Standard Book Number | 0-19-513605-5 |
| Price | 325.00 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | IST |
| 041 ## - Language | |
| Language | English |
| 082 ## - DDC NUMBER | |
| Classification number | 621.38152 |
| Book Number | CAM/S |
| Edition number | ed.2 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, Stephen A. |
| 245 ## - TITLE STATEMENT | |
| Title | The science and engineering of microelectronic fabrication |
| Staterment of Responsibility | Stephen A. Campbell |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | New York |
| Name of publisher, distributor, etc | Oxford University Press |
| Date of publication, distribution, etc | 2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Pages | xiv, 603p. |
| Dimension | 23 cm |
| 440 ## - Series Statement | |
| Series Title | The Oxford series in electrical and computer engineering |
| 500 ## - GENERAL NOTE | |
| General note | includes bibliographical references & index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| TOPICAL TERM | 1. ELECTRICAL ENGINEERING |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| TOPICAL TERM | 2. ELECTRONICS ENGINEERING |
| 710 ## - Added Entry Corporate | |
| Location | Gen. Stack- 56-[A] |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Location (home branch) | Sublocation or collection (holding branch) | Shelving location | Date acquired | Koha issues (times borrowed) | Koha full call number | Barcode (Accession No.) | Koha date last seen | Price effective from | Koha item type | Koha collection |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | IST | IST | General Stacks | 07/12/2017 | 621.38152 CAM/S | 4407 | 07/12/2017 | 07/12/2017 | Books | ||||||
| Dewey Decimal Classification | IST | IST | 07/12/2017 | 621.38152 CAM/S | 4410 | 07/12/2017 | 07/12/2017 | Books | |||||||
| Dewey Decimal Classification | IST | IST | 07/12/2017 | 621.38152 CAM/S | 4409 | 07/12/2017 | 07/12/2017 | Books | |||||||
| Dewey Decimal Classification | Not For Loan | IST | IST | Reference | 04/02/2018 | 621.38152 CAM/S | 4408 | 04/02/2018 | 04/02/2018 | Books | Reference |