TY  - BOOK
AU  - Sze, S.M ed.
ED  - 
TI  - VLSI Technology
SN  - 0-07-058291-2
U1  - 621.395 ed.2
PY  - 2003///
CY  - New Deli
PB  - Tata McGraw-Hill 
KW  - 1. COMPUTER SCIENCE
KW  - 2. METALLIZATION
N1  - Includes index
ER  -