TY  - BOOK
AU  - Campbell, Stephen A.
ED  - 
TI  - The science and engineering of microelectronic fabrication
SN  - 0-19-513605-5
U1  - 621.38152 ed.2
PY  - 2001///
CY  - New York
PB  - Oxford University Press
KW  - 1. ELECTRICAL ENGINEERING
KW  - 2. ELECTRONICS ENGINEERING
N1  - includes bibliographical references & index
ER  -