621.38152
CAM/S

4407
4410
4409
4408

Campbell, Stephen A. The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - New York : Oxford University Press, 2001 .
xiv, 603p. ; 23 cm . - (The Oxford series in electrical and computer engineering ) includes bibliographical references & index 0-19-513605-5 325.00
1. ELECTRICAL ENGINEERING 2. ELECTRONICS ENGINEERING * Series